Orthophosphoric acid ≥85%, Finyte® for microelectronic, J.T.Baker®

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Synonyms: Phosphoric acid

5854-05EA 475 GBP
5854-05
Orthophosphoric acid ≥85%, Finyte® for microelectronic, J.T.Baker®
Orthophosphoric acid
Formula: H₃PO₄
MW: 98 g/mol
MDL Number: MFCD00011340
CAS Number: 7664-38-2
UN: 1805
ADR: 8,III

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Specification Test Results

For Microelectronic Use
Store at temperatures above 22°C (72°F)
Assay (H₃PO₄) (by acidimetry) 85.0 - 87.0 %
Color (APHA) ≤10
Volatile Acids (µeq/g) ≤0.16
Chloride (Cl) ≤0.7 ppm
Nitrate (NO₃) ≤1.5 ppm
Sulfate (SO₄) ≤8 ppm
Trace Impurities - Aluminum (Al) ≤400.0 ppb
Trace Impurities - Antimony (Sb) ≤6000.0 ppb
Trace Impurities - Arsenic (As) ≤50.0 ppb
Trace Impurities - Calcium (Ca) ≤450.0 ppb
Trace Impurities - Chromium (Cr) ≤200.0 ppb
Trace Impurities - Cobalt (Co) ≤50.0 ppb
Trace Impurities - Copper (Cu) ≤50 ppb
Trace Impurities - Gold (Au) ≤150.0 ppb
Trace Impurities - Iron (Fe) ≤700.0 ppb
Trace Impurities - Lead (Pb) ≤100 ppb
Trace Impurities - Lithium (Li) ≤100.0 ppb
Trace Impurities - Magnesium (Mg) ≤100.0 ppb
Trace Impurities - Manganese (Mn) ≤100.0 ppb
Trace Impurities - Nickel (Ni) ≤200.0 ppb
Trace Impurities - Potassium (K) ≤200.0 ppb
Trace Impurities - Sodium (Na) ≤500.0 ppb
Trace Impurities - Strontium (Sr) ≤100.0 ppb
Trace Impurities - Titanium (Ti) ≤300.0 ppb
Trace Impurities - Zinc (Zn) ≤300.0 ppb
Particle Count at point of fill - 0.5 µm and greater ≤50 par/ml
Particle Count at point of fill - 1.0 µm and greater ≤10 par/ml
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