Inline gas filters, Wafergard® GT-Plus

Supplier: Entegris
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Wafergard®
ENTEWGFG21KP0EA 0 GBP
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Inline gas filters, Wafergard® GT-Plus
Filters Gas Filters
These inline gas filters are designed to removed particles from inert gases for flow rates up to 30 L/min.

  • Particle retention of >99,99% removal of all particles greater than 0,003 µm diameter
  • Can be used with low air intake filter, wafer transport system and clean dry air system

Supports/housing: PFA; membrane: PTFE

Filtration area: 12 cm²
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